Szukana fraza: [Abstract = "In this research zeta potential and dynamic light scattering measurements are applied as preliminary step aimed at determining optimum pH and coagulant dosage range based on the observation of inter particle\-particle behavior in a CMP suspension. The first phase of the conducted study is to analyze nanoscale colloids in the CMP suspension in terms of zeta potential and z\-average particle size as a function of pH within a range of 2 to 12. Two types of coagulants were investigated \- polyaluminum chloride \(PACl\) and ferrous sulfate heptahydrate \(FeSO4x7H2O\)."]

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